Stress and microstructure of nanocrystalline FeXN (X = Ta, Si, and Al) thin films

Journal of Crystal Growth

Volumn 174, Issue 1-4, 1997, Pages 501-505

  Minor, M K ^a   Barnard, J A ^a  

^a University of Alabama   (United States)

Author keywords

FeAlN; FeSiN; FeTaN; Thin film stress; Thin films

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; IRON ALLOYS; MAGNETIC ANISOTROPY; MAGNETIC DOMAINS; MAGNETIC THIN FILMS; NITRIDES; STRESS CONCENTRATION;

BIAXIAL MODULUS; IRON ALUMINUM NITRIDE; IRON SILICON NITRIDE; IRON TANTALUM NITRIDE; MAGNETOELASTIC ANISOTROPY;

NANOSTRUCTURED MATERIALS;

EID: 0031547240     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)01149-9     Document Type: Article

References (18)

1. M.A. Russak, C.V. Jahnes, E. Klokholm, J.W. Lee, M.E. Re and B.C. Webb, J. Magn. Magn. Mater. 104-107 (1992) 1851.
2. Y. Watanabe, H. Oura and N. Onozato, IEEE Trans. Magn. MAG-26 (1990) 1500.
3. N. Ishiwata, C. Wakabayashi and H. Urai, J. Appl. Phys. 69 (1991) 5616.
4. M. Takahashi, H. Shoji, T. Shimatsu, H. Komaba and T. Wakiyama, IEEE Trans. Magn. MAG-26 (1990) 1503.
5. P. Zheng, J.A. Bain and M.H. Kryder, IEEE Trans. Magn. 32 (1996) 4541.
6. N. Ishiwata, Y. Takeshima, T. Konehari and H. Urai, presented at the 6th Int. Conf. on Ferrites, in press.
7. J.C. Cates, C.A. Alexander, Jr., E. Haftek and J.A. Barnard, IEEE Trans. Magn. 29 (1993) 3105.
8. J.C. Cates, G. Qiu, E. Haftek, C.A. Alexander, Jr. and J.A. Barnard, Mater. Res. Soc. Symp. Proc. 313 (1993) 345.
9. G. Qiu, E. Haftek, J.C. Cates, C.A. Alexander, Jr. and J.A. Barnard, Mater. Res. Soc. Symp. Proc. 313 (1993) 339.
10. G. Qiu, E. Haftek and J.A. Barnard, J. Appl. Phys. 73 (1993) 6573.
11. ASM International, ASM Handbook, Vol. 3, Alloy Phase Diagrams (ASM International, OH, 1992) pp. 2-44, 2-203.
12. T. Massalski, Binary Alloy Phase Diagrams, pp. 112, 135-136, 1081-1082, 1108-1111, 1653.
13. M.K. Minor, B. Viala and J.A. Barnard, J. Appl. Phys. 79 (1996) 5005.
14. V. Raghavan, Phase Diagrams of Ternary Iron Alloys (ASM International, OH, 1987) pp. 143-209.
15. B. Viala, M.K. Minor and J.A. Barnard, J. Appl. Phys. 80 (1996) 3941.
16. T.B. Rymer, Nuovo Cimento 6 (1957) 294.
17. J.A. Thornton and D.W. Hoffman, Thin Solid Films 171 (1989) 5.
18. H. Deng, M.K. Minor and J.A. Barnard, presented at the 1996 MRS Spring Meeting, San Francisco, MRS Symp. Proc., in press.