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Volumn 10, Issue 3, 2001, Pages 327-335

Comparison of capacitive and feedback-interferometric measurements on MEMS

a IEEE (Italy)

Author keywords

Mechanical variables measurement; Microelectromechanical systems (MEMS); Micromachining; Microsensors; Optical interferometry

Indexed keywords

FEEDBACK INTERFEROMETRY; MICRORESONATOR;

ACCELEROMETERS; CAPACITORS; GYROSCOPES; INTERFEROMETRY; MECHANICAL VARIABLES MEASUREMENT; MICROSENSORS; OPTIMIZATION; RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035441451 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.946778 Document Type: Article

Times cited : (23)

References (21)

1
- 0002982341
- Design, test, integration and packaging of MEMS/MOEMS
- B. Courtois et al., Ed.
- SPIE Proc., 2000 , vol.4019 , pp. 344-398

2
- 0002982713
- Proceedings of micromachined devices and components III
- (1997) SPIE Proc. , vol.3224 , pp. 40-131
- Chau, K.¹ French, P.J.²

4
- 0030110593
- Surface micromachined accelerometers
- (1996) IEEE J. Solid-State Circuits , vol.31 , pp. 366-375
- Boser, B.E.¹ Howe, R.T.²

6
- 0025698093
- Electrostatic-comb drive of lateral polysilicon resonator
- (1990) Sensors Actuators , vol.21 A , pp. 328-331
- Tang, W.C.¹ Nguyen, T.C.H.² Judy, M.W.³ Howe, R.T.⁴

8
- 0031700506
- Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs
- (1998) Sensors Actuators A , vol.64 A , pp. 69-76
- Park, K.Y.¹ Lee, C.W.² Oh, Y.S.³ Cho, Y.H.⁴

9
- 0005461378
- Optical measurement of micromachine engine performance
- SPIE
- (1997) Proc. Micromachined Devices and Components III , vol.3224 , pp. 131-140
- Holswade, S.C.¹ Dickey, F.M.²

10
- 0031386052
- A system for the dynamic characterization of microstructures
- (1997) J. Microelectromechan. Syst. , vol.6 , Issue.4 , pp. 322-328
- Burdess, J.S.¹ Harris, A.J.² Wood, D.³ Pitcher, R.⁴ Glennie, D.⁵

11
- 0033364721
- Optical methods for micromachine monitoring and feedback
- (1999) Sensors Actuators A , vol.78 , pp. 220-235
- Dickey, F.M.¹ Holswade, S.C.² Hornak, L.A.³ Brown, K.S.⁴

12
- 0029207467
- Laser diode feedback interferometer for measurement of displacement without ambiguity
- (1995) IEEE J. Quantum Electron. , vol.31 , pp. 113-119
- Donati, S.¹ Giuliani, G.² Merlo, S.³

13
- 0001666671
- Applications of diode laser feedback interferometry
- (1998) J. Optics , vol.29 , pp. 156-161
- Donati, S.¹ Merlo, S.²

14
- 0000506147
- Feedback interferometry with semiconductor laser for high resolution displacement sensing
- SPIE Europto series
- (1996) Proc. "Micro-Optical Technologies for Measurement Sensors, and Microsystems" (1996) , vol.2783 , pp. 203-210
- Donati, S.¹ Merlo, S.² Micolano, F.³

15
- 0018995667
- External optical feedback effects on semiconductor injection laser properties
- Mar.
- (1980) IEEE J. Quantum Electron. , vol.16 QE , Issue.3 , pp. 347-355
- Lang, R.¹ Kobayashi, K.²

16
- 0028467826
- Chaos and locking in a semiconductor laser due to external injection
- July
- (1994) IEEE J. Quantum Electron. , vol.30 QE , pp. 1537-1541
- Annovazzi-Lodi, V.¹ Donati, S.² Manna, M.³

17
- 0030181538
- Silicon resonator sensor system using self-mixing interferometry
- (1996) Sensors Actuators , vol.55 A , pp. 71-77
- Hauptmann, M.A.¹ Grattan, K.T.V.² Palmer, A.W.³ Fritsch, H.⁴ Lucklum, R.⁵ Hauptmann, P.R.⁶

18
- 0003484546
- Upper Saddle River, NJ: Prentice Hall
- (2000) Photodetectors , pp. 270-275
- Donati, S.¹

19
- 0033699511
- Analysis of the signal amplitude regimes in injection-detection using laser diodes
- (2000) SPIE Proc. , vol.3944 , pp. 639-644
- Donati, S.¹ Giuliani, G.²

20
- 0003571074
- New York: Springer-Verlag; ch. 1
- (1995) Vibration of Structures and Machines
- Genta, G.¹

21
- 0032640070
- Accurate full-coupled natural frequency shift of MEMS actuators due to voltage bias and other external forces
- Proc. MEMS 99', 1999 , pp. 321-325
- Yie, Y.¹ Marchetti, J.² Gallegos, C.³ Maseeh, F.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.