Experimental characterization of dynamic micromechanical transducers

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 177-186

  Lärmer, Franz ^a   Schilp, Andrea ^a   Funk, Karsten ^a   Burrer, Christian ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRIC EXCITATION; ELECTRIC VARIABLES MEASUREMENT; GYROSCOPES; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

DYNAMIC MICROMECHANICAL TRANSDUCERS;

TRANSDUCERS;

EID: 0030092211     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/037     Document Type: Article

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