Design, modeling and verification of MEMS silicon torsion mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3226, Issue , 1997, Pages 114-124

  Pan, F ^a   Kubby, J ^a   Peeters, E ^a   Chen, J K ^a   Vitomirov, O ^a   Taylor, D ^b   Mukherjee, S ^c  

^a XEROX CORPORATION   (United States)

^b School of Chemical and Molecular Engineering   (United States)

^c Department of Molecular Biology and Genetics   (United States)

Author keywords

Modeling; Natural modes; Sensitivity analysis; Torsion mirror; Verification

Indexed keywords

AND VERIFICATIONS; APPLIED VOLTAGES; DISPLACEMENT COMPONENTS; EXCITATION FREQUENCIES; EXPERIMENTAL MEASUREMENTS; LASER PRINTINGS; MECHANICAL ANALYSIS; MECHANICAL RESPONSES; MIRROR DESIGNS; MODELING; MODELING RESULTS; NATURAL MODES; OPTICAL MODELING; OPTICAL PERFORMANCES; QUADRATIC SURFACES; REFLECTING MIRRORS; TORSION MIRROR;

DESIGN; FREQUENCY RESPONSE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; OPTICAL SYSTEMS; SENSITIVITY ANALYSIS; SOFTWARE DESIGN; TORSIONAL STRESS;

MIRRORS;

EID: 0004546275     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284559     Document Type: Conference Paper

References (3)

1. K.E. Petersen, Silicon torsion scanning mirror, IBM J. Res. Develop. Vol. 24, p. 631, 1980.
2. MEMCAD 3.0 User Guide, Microcosm Technologies, Inc., 1997.
3. MEMCAD 3.0 Reference Manual, Microcosm Technologies, Inc., 1997.