Experimental adaptation of model parameters for microelectromechanical systems (MEMS)

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 760-764

  Kurth, Steffen ^a   Dötzel, Wolfram ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Dynamic testing; Micromirror arrays; System identification

Indexed keywords

COMPUTER SIMULATION; OSCILLATORS (MECHANICAL); TRANSFER FUNCTIONS;

DYNAMIC TESTING; MICROMIRROR ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031176324     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01578-1     Document Type: Article

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