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Volumn 2, Issue , 1999, Pages 423-435
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Thermal flow micro sensors
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Author keywords
[No Author keywords available]
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Indexed keywords
ANEMOMETERS;
CALORIMETRY;
MICROMACHINING;
SILICON;
THERMAL EFFECTS;
THERMAL FLOW MICROSENSORS;
MICROSENSORS;
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EID: 0033357132
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (90)
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References (51)
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