A silicon mass flow control micro-system

Mecanique et Industries

Volumn 2, Issue 4, 2001, Pages 363-369

  Lo, Lieh Hsi ^a,b   Tsai, Ming Jye ^a   Tsai, Tsung Han ^a   Fan, Chin Hon ^a   Wu, Chia Lin ^a   Huang, Ruey Shing ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b Department of Electrical Engineering   (Taiwan)

Author keywords

Activateur thermique; Contr le du d bit massique; D tecteur d' coulement; Flow sensor; Mass flow controller; MFC; Micro valve; Micro vavle; Thermal actuation; Valve

Indexed keywords

EID: 0347420211     PISSN: 12962139     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1296-2139(01)01107-1     Document Type: Article

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