Integrated thin film heater-thermocouple systems

Microelectronics Reliability

Volumn 43, Issue 3, 2003, Pages 509-512

  Golan, G ^a   Axelevitch, A ^a   Sigalov, B ^a   Gorenstein, B ^a  

^a OPEN UNIVERSITY OF ISRAEL   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; DEPOSITION; HEAT RESISTANCE; MICROELECTRONICS; SEEBECK EFFECT; SENSORS; THIN FILM DEVICES;

INTEGRATED THIN FILM HEATERS;

THERMOCOUPLES;

EID: 0037370336     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(02)00320-7     Document Type: Conference Paper

References (10)

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3. NPC "POLITEH", http://www.carmirror.ru/warm.html.
4. ® USA, LLC, www.thermostone.com/thinfilm.htm.
5. Bohrer PJ. Flow sensor, US Patent 4,478,076, September 30, 1982.
6. Hideaki T, Haruyoshi K, Takashi T, Kiyoharu H, Hideaki M. Thin film oxygen sensor with microheater, US Patent 4,574,264, November 15, 1983.
7. Johnson SD. Sampling probe flow sensor, US Patent 4,856,328, June 30, 1988.
8. Auding H, Gunter F, Heiner K, Bruno V. Thin-film heating element, US Patent 4,889,974, February 22, 1988.
9. Fujii S, Tsuno T. Diamond heater, US Patent 5,695,670, December 8, 1994.
10. Lyulevich V.V., Yaminskii I.V. Microheater with temperature stabilization for a scanning probe microscope. Exp. Dev. Tech. [in Russian]. 2:2000;149-150.