Wide range semiconductor flow sensors

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 139-146

  Glaninger, A ^a   Jachimowicz, A ^b   Kohl, F ^a   Chabicovsky, R ^a   Urban, G ^b  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW MEASUREMENT; MICROMACHINING; SEMICONDUCTING GERMANIUM; SHOCK WAVES; THERMISTORS; THIN FILMS;

SEMICONDUCTOR FLOW SENSORS; SIGNAL RISE TIME;

MICROSENSORS;

EID: 0034250941     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00370-8     Document Type: Article

References (16)

1. Kuttner H., Urban G., Jachimowicz A., Kohl F., Olcaytug F., Goiser P. Microminiaturized thermistor arrays for temperature gradient, flow and perfusion measurements. Sens. Actuators, A. 25-27:1991;641-645.
2. Moser D., Lenggenhager R., Baltes H. Silicon gas flow sensors using industrial CMOS and bipolar IC technology. Sens. Actuators, A. 25-27:1991;577-581.
3. Hsieh H.Y., Spetz A., Zemel J.N. Pyroelectric anemometry: vector and swirl measurements. Sens. Actuators, A. 49:1995;141-147.
4. Kersjes R., Liebscher F., Spiegel E., Manoli Y., Mokwa W. An invasive catheter flow sensor with on-chip CMOS readout electronics for the on-line determination of blood flow. Sens. Actuators, A. 54:1996;563-567.
5. Bouwstra S., Legtenberg R., Tilmans H.A.C., Elwenspoek M. Resonating microbridge mass flow sensor. Sens. Actuators, A. 21-23:1990;332-335.
6. Berberig O., Nottmeyer K., Mizuno J., Kanai Y., Kobayashi T. The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement. Sens. Actuators, A. 66:1998;93-98.
7. G. Urban, A. Jachimowicz, H. Ernst, S. Seifert, J. Freund, Ultrasensitive flow sensors for liquids using thermal microsystems, CDROM Proc. Eurosensors XIII, Den Haag, Sept. 12-15, 1999.
8. Mott N.F., Davies E.A. Electronic Processes in Noncrystalline Materials. 1979;Clarendon Press, Oxford.
9. A. Glaninger, Electrocalorimetric air flow measurement with a micromachined semiconductor sensor, Diploma thesis, Vienna University of Technology, 1998.
10. Frank P., von Mises R. Differentialgleichungen der Physik. Band 2:1961;541 Vieweg.
11. Mastrangelo C.H., Tai Y.C., Muller R.S. Thermophysical properties of low-residual stress, silicon rich, LPCVD silicon nitride films. Sens. Actuators, A. 23:1996;856-860.
12. Gröber H., Erk S., Grigull U. Die Grundgesetze der Wärmeübertragung. 1981;205-209 Springer.
13. Heckl M., Müller H.A. Taschenbuch der Technischen Akustik. 1975;7 Springer.
14. Cremer L., Müller H.A. Die wissenschaftlichen Grundlagen der Raumakustik. Band 2:1976;69-72 Hirzel.
15. de Bree H.E., Leussink P., Korthorst T., Jansen H., Lammerink T.S.J., Elwenspoek M. The μ-flown: a novel device for measuring acoustic flows. Sens. Actuators, A. 54:1996;552-557.
16. Steurer J., Kohl F. Adaptive controlled thermal sensor for measuring gas flow. Sens. Actuators, A. 65:1998;116-122.