A multi-zone, multi-gas reactive sputtering control system

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2005, Pages 3-8

  Sproul, W D ^a   Christie, D J ^b   Carter, D C ^b  

^a Reactive Sputtering Consulting LLC   (United States)

^b Advanced Energy Industries Incorporated   (United States)

Author keywords

Multiple gases; Multiple zones; Reactive sputtering; Sputtering

Indexed keywords

FEEDBACK SIGNALS; GLASS COATERS; MULTIPLE GASES; REACTIVE SPUTTERING;

COATINGS; ELECTRIC POTENTIAL; FEEDBACK; LIGHT EMISSION; MASS SPECTROMETERS; MULTIPLE ZONES;

SPUTTERING;

EID: 33644985601     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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