Gas inlet systems for large area linear magnetron sputtering sources

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2001, Pages 204-209

  Milde, F ^a   Teschner, G ^a   May, C ^a  

^a Von Ardenne Anlagentechnik GmbH   (Germany)

Author keywords

Glass coating; Reactive deposition; Sputter deposition; Web coating

Indexed keywords

COATING TECHNIQUES; INTAKE SYSTEMS; NOZZLES; PARTIAL PRESSURE; PRESSURE DISTRIBUTION; SPUTTER DEPOSITION;

GAS INLET SYSTEMS;

MAGNETRON SPUTTERING;

EID: 0035208548     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Modelling the stability of reactive sputtering processes
2. Gas distribution through injection manifolds in vacuum systems
3. Progress in the application of the plasma emission monitor in web coating