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Journal of Materials Science

Volumn 37, Issue 13, 2002, Pages 2737-2745

Optical properties and local atomic order in non hydrogenated amorphous silicon carbonitride films

(8) Doucey, B a Cuniot, M b Moudni, R b Tenegal F c Bouree J E d Imhoff, D e Rommeluere M b Dixmier, J b

a UNIVERSITY OF LIMOGES (France)

b Centre National de la Recherche Scientifique (France)

c SYNCHROTRON SOLEIL (France)

d LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

e UNIVERSITÉ PARIS SACLAY (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; BOND STRENGTH (CHEMICAL); CRYSTAL STRUCTURE; CRYSTALLIZATION; ELLIPSOMETRY; FILM PREPARATION; HYDROGENATION; OPTICAL PROPERTIES; SILICON NITRIDE; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS;

X RAY ABSORPTION NEAR EDGE SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 0036641695 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/A:1015877302156 Document Type: Article

Times cited : (8)

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