Relation between local composition, chemical environment and phase shift behavior in Cr-based oxycarbonitride thin films

Materials Research Society Symposium-Proceedings

Volumn 636, Issue , 2001, Pages D531-D536

  Smith, J R ^a   Graat, P C J ^b   Bonnell, D A ^a   French, R H ^c  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^c DUPONT COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; CHROMIUM COMPOUNDS; MASS SPECTROMETRY; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PHOTOLITHOGRAPHY; SPUTTER DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEEP ULTRAVIOLET (DUV) PHOTOMASKS;

MASKS;

EID: 0034817843     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. Consequence of composition/property variations at multiple length scales to macroscopic properties of CrOCN thin films
2. Optical analysis of complex multilayer structures using multiple data types