SCOPUS 정보 검색 플랫폼

Physical Review B - Condensed Matter and Materials Physics

Volumn 73, Issue 11, 2006, Pages

Annealing of electron-, proton-, and ion-produced vacancies in Si

(6) Dannefaer, S a Avalos, V a Kerr, D a Poirier, R b Shmarovoz, V c Zhang, S H d

a UNIVERSITY OF WINNIPEG (Canada)

b UNIVERSITÉ DE MONTRÉAL (Canada)

c JOINT INSTITUTE FOR NUCLEAR RESEARCH (Russian Federation)

d LANZHOU UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33644922998 PISSN: 10980121 EISSN: 1550235X Source Type: Journal
DOI: 10.1103/PhysRevB.73.115202 Document Type: Article

Times cited : (16)

References (51)

1
- 36149019492
- PRVAAH 0096-8250 10.1103/PhysRev.138.A543
- G. D. Watkins and J. W. Corbett, Phys. Rev. PRVAAH 0096-8250 10.1103/PhysRev.138.A543 138, A543 (1965).
- (1965) Phys. Rev. , vol.138 , pp. 543
- Watkins, G.D.¹ Corbett, J.W.²

2
- 36149013384
- PRVAAH 0096-8250 10.1103/PhysRev.138.A555
- J. W. Corbett and G. D. Watkins, Phys. Rev. PRVAAH 0096-8250 10.1103/PhysRev.138.A555 138, A555 (1965).
- (1965) Phys. Rev. , vol.138 , pp. 555
- Corbett, J.W.¹ Watkins, G.D.²

3
- 36049055660
- PHRVAO 0031-899X 10.1103/PhysRev.152.761
- L. J. Cheng, J. C. Corelli, J. W. Corbett, and G. D. Watkins, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.152.761 152, 761 (1966).
- (1966) Phys. Rev. , vol.152 , pp. 761
- Cheng, L.J.¹ Corelli, J.C.² Corbett, J.W.³ Watkins, G.D.⁴

4
- 0142123456
- JCOMEL. 0953-8984
- For a recent summary, see V. P. Markevich, A. R. Peaker, S. B. Lastovskii, L. I. Murin, and L. J. Lindström, J. Phys.: Condens. Matter JCOMEL 0953-8984 15, 2779 (2003).
- (2003) J. Phys.: Condens. Matter , vol.15 , pp. 2779
- Markevich, V.P.¹ Peaker, A.R.² Lastovskii, S.B.³ Murin, L.I.⁴ Lindström, L.J.⁵

5
- 0012286824
- JPSOAW 0022-3719 10.1088/0022-3719/8/22/032
- R. C. Newman and D. H. J. Totterdell, J. Phys. C JPSOAW 0022-3719 10.1088/0022-3719/8/22/032 8, 3944 (1975).
- (1975) J. Phys. C , vol.8 , pp. 3944
- Newman, R.C.¹ Totterdell, D.H.J.²

6
- 21544458205
- APPLAB 0003-6951 10.1063/1.114465
- N. Cuendet, T. Halicioglu, and W. A. Tiller, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.114465 67, 1063 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1063
- Cuendet, N.¹ Halicioglu, T.² Tiller, W.A.³

7
- 0037087962
- PRBMDO 0163-1829 10.1103/PhysRevB.65.115210
- T. E. M. Staab, A. Sieck, M. Haugk, M. J. Puska, Th. Frauenheim, and H. S. Leipner, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.65.115210 65, 115210 (2002).
- (2002) Phys. Rev. B , vol.65 , pp. 115210
- Staab, T.E.M.¹ Sieck, A.² Haugk, M.³ Puska, M.J.⁴ Frauenheim, Th.⁵ Leipner, H.S.⁶

8
- 3543110243
- PRLTAO 0031-9007 10.1103/PhysRevLett.92.255504
- D. V. Makhov and Laurent J. Lewis, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.92.255504 92, 255504 (2004).
- (2004) Phys. Rev. Lett. , vol.92 , pp. 255504
- Makhov, D.V.¹ Lewis, L.J.²

9
- 0345873464
- PHYBE3 0921-4526
- R. Poirier, V. Avalos, S. Dannefaer, F. Schiettekatte, and S. Rooda, Physica B PHYBE3 0921-4526 340-342, 609 (2003).
- (2003) Physica B , vol.340-342 , pp. 609
- Poirier, R.¹ Avalos, V.² Dannefaer, S.³ Schiettekatte, F.⁴ Rooda, S.⁵

10
- 33644919233
- P. Kirkegaard, N. J. Petersen, and M. Eldrup, computer code PAFIT-88, Risø M-2740, Risø, DK-4000 Roskilde, Denmark.
- Kirkegaard, P.¹ Petersen, N.J.² Eldrup, M.³

11
- 0000565974
- PRBMDO. 0163-1829. 10.1103/PhysRevB.57.12911
- H. Kauppinen, C. Corbel, J. Nissilä, K. Saarinen, and P. Hautojärvi, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.57.12911 57, 12911 (1998).
- (1998) Phys. Rev. B , vol.57 , pp. 12911
- Kauppinen, H.¹ Corbel, C.² Nissilä, J.³ Saarinen, K.⁴ Hautojärvi, P.⁵

12
- 0037150618
- ASUSEE 0169-4332 10.1016/S0169-4332(02)00127-7
- X. D. Pi, C. P. Burrows, and P. G. Coleman, Appl. Surf. Sci. ASUSEE 0169-4332 10.1016/S0169-4332(02)00127-7 194, 255 (2002).
- (2002) Appl. Surf. Sci. , vol.194 , pp. 255
- Pi, X.D.¹ Burrows, C.P.² Coleman, P.G.³

13
- 84918375715
- ADPHAH 0001-8732 10.1080/00018737300101299
- R. N. West, Adv. Phys. ADPHAH 0001-8732 10.1080/00018737300101299 22, 263 (1973).
- (1973) Adv. Phys. , vol.22 , pp. 263
- West, R.N.¹

14
- 0000394550
- PRBMDO 0163-1829 10.1103/PhysRevB.41.9980
- M. J. Puska, C. Corbel, and R. M. Nieminen, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.41.9980 41, 9980 (1990).
- (1990) Phys. Rev. B , vol.41 , pp. 9980
- Puska, M.J.¹ Corbel, C.² Nieminen, R.M.³

15
- 0035925983
- NIMAER 0168-9002 10.1016/S0168-9002(01)00171-1
- S. Dannefaer and A. Pu, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 10.1016/S0168-9002(01)00171-1 462, 596 (2001).
- (2001) Nucl. Instrum. Methods Phys. Res. a , vol.462 , pp. 596
- Dannefaer, S.¹ Pu, A.²

16
- 3743144594
- JPSOAW 0022-3719 10.1088/0022-3719/15/10/024
- F. Carton-Merlet, B. Pajot, D. T. Don, C. Porte, B. Clerjaud, and P. M. Mooney, J. Phys. C JPSOAW 0022-3719 10.1088/0022-3719/15/10/024 15, 2239 (1982).
- (1982) J. Phys. C , vol.15 , pp. 2239
- Carton-Merlet, F.¹ Pajot, B.² Don, D.T.³ Porte, C.⁴ Clerjaud, B.⁵ Mooney, P.M.⁶

17
- 0006870887
- PRBMDO 0163-1829 10.1103/PhysRevB.54.1724
- V. Avalos and S. Dannefaer, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.54.1724 54, 1724 (1996).
- (1996) Phys. Rev. B , vol.54 , pp. 1724
- Avalos, V.¹ Dannefaer, S.²

18
- 0029309343
- JAPNDE 0021-4922 10.1143/JJAP.34.2197
- A. Kawasuso, M. Hasagawa, M. Suezawa, S. Yamaguchi, and K. Sumino, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.34.2197 34, 2197 (1995).
- (1995) Jpn. J. Appl. Phys., Part 1 , vol.34 , pp. 2197
- Kawasuso, A.¹ Hasagawa, M.² Suezawa, M.³ Yamaguchi, S.⁴ Sumino, K.⁵

19
- 0000596921
- PRBMDO 0163-1829 10.1103/PhysRevB.53.7810
- M. Saito and A. Oshiyama, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.53.7810 53, 7810 (1996).
- (1996) Phys. Rev. B , vol.53 , pp. 7810
- Saito, M.¹ Oshiyama, A.²

20
- 0034238571
- DRMTE3 0925-9635
- A. Pu, T. Bretagnon, D. Kerr, and S. Dannefaer, Diamond Relat. Mater. DRMTE3 0925-9635 9, 1450 (2000).
- (2000) Diamond Relat. Mater. , vol.9 , pp. 1450
- Pu, A.¹ Bretagnon, T.² Kerr, D.³ Dannefaer, S.⁴

21
- 0000957241
- PRBMDO 0163-1829 10.1103/PhysRevB.58.10475
- J. Kuriplach, A. L. Morales, C. Dauwe, D. Segers, and M. Šob, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.58.10475 58, 10475 (1998).
- (1998) Phys. Rev. B , vol.58 , pp. 10475
- Kuriplach, J.¹ Morales, A.L.² Dauwe, C.³ Segers, D.⁴ Šob, M.⁵

22
- 0000258861
- PLRBAQ 0556-2805 10.1103/PhysRevB.14.2709
- S. Dannefaer, G. W. Dean, D. P. Kerr, and B. G. Hogg, Phys. Rev. B PLRBAQ 0556-2805 10.1103/PhysRevB.14.2709 14, 2709 (1976).
- (1976) Phys. Rev. B , vol.14 , pp. 2709
- Dannefaer, S.¹ Dean, G.W.² Kerr, D.P.³ Hogg, B.G.⁴

23
- 33644889749
- MSFOEP 0255-5476
- R. Oshima, M. Mori, G.-C. Jua, S. Honda, M. Kiritani, and F. E. Fujita, Mater. Sci. Forum MSFOEP 0255-5476 38-41, 1199 (1989).
- (1989) Mater. Sci. Forum , vol.38-41 , pp. 1199
- Oshima, R.¹ Mori, M.² Jua, G.-C.³ Honda, S.⁴ Kiritani, M.⁵ Fujita, F.E.⁶

24
- 0028198044
- JAPNDE 0021-4922 10.1143/JJAP.33.1
- A. Uedono, Y.-K. Cho, S. Tanigawa, and A. Ikari, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.33.1 33, 1 (1994).
- (1994) Jpn. J. Appl. Phys., Part 1 , vol.33 , pp. 1
- Uedono, A.¹ Cho, Y.-K.² Tanigawa, S.³ Ikari, A.⁴

25
- 33644915400
- CSBUEF 1001-6538
- H. Maorong, W. Yunyu, Y. Juhua, H. E. Yonshu, G. Yinhyan, and L. Caichi, Chin. Sci. Bull. CSBUEF 1001-6538 42, 26 (1997).
- (1997) Chin. Sci. Bull. , vol.42 , pp. 26
- Maorong, H.¹ Yunyu, W.² Juhua, Y.³ Yonshu, H.E.⁴ Yinhyan, G.⁵ Caichi, L.⁶

26
- 0000650719
- PRBMDO. 0163-1829. 10.1103/PhysRevB.55.9598
- H. Kauppinen, C. Corbel, K. Skog, K. Saarinen, T. Laine, P. Hautojärvi, P. Desgardin, and E. Ntsoenzok, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.55.9598 55, 9598 (1997).
- (1997) Phys. Rev. B , vol.55 , pp. 9598
- Kauppinen, H.¹ Corbel, C.² Skog, K.³ Saarinen, K.⁴ Laine, T.⁵ Hautojärvi, P.⁶ Desgardin, P.⁷ Ntsoenzok, E.⁸

27
- 1842697598
- JAPIAU 0021-8979 10.1063/1.372398
- M. Coeck, M. Balcaen, T. van Hoecke, B. van Waeyenberge, D. Segers, C. Dauwe, and C. Laermans, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.372398 87, 3674 (2000).
- (2000) J. Appl. Phys. , vol.87 , pp. 3674
- Coeck, M.¹ Balcaen, M.² Van Hoecke, T.³ Van Waeyenberge, B.⁴ Segers, D.⁵ Dauwe, C.⁶ Laermans, C.⁷

28
- 0442294248
- JMTSAS 0022-2461
- V. Bondarenko, R. Krause-Rehberg, H. Feick, and C. Davia, J. Mater. Sci. JMTSAS 0022-2461 39, 919 (2004).
- (2004) J. Mater. Sci. , vol.39 , pp. 919
- Bondarenko, V.¹ Krause-Rehberg, R.² Feick, H.³ Davia, C.⁴

29
- 36449009261
- JAPIAU 0021-8979 10.1063/1.352905
- S. Dannefaer, P. Mascher, and D. Kerr, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.352905 73, 3740 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 3740
- Dannefaer, S.¹ Mascher, P.² Kerr, D.³

30
- 0037096506
- PRBMDO 0163-1829 10.1103/PhysRevB.65.233205
- G. S. Hwang and William A. Goddard III, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.65.233205 65, 233205 (2002).
- (2002) Phys. Rev. B , vol.65 , pp. 233205
- Hwang, G.S.¹ Goddard III, W.A.²

31
- 4043067953
- PSSABA 0031-8965
- H. S. Leipner, Z. Wang, H. Gu, V. V. Mikhnovich, Jr., V. Bondarenko, R. Krause-Rehberg, J.-L. Demont, and J. Rabier, Phys. Status Solidi A PSSABA 0031-8965 201, 2021 (2004).
- (2004) Phys. Status Solidi a , vol.201 , pp. 2021
- Leipner, H.S.¹ Wang, Z.² Gu, H.³ Mikhnovich Jr., V.V.⁴ Bondarenko, V.⁵ Krause-Rehberg, R.⁶ Demont, J.-L.⁷ Rabier, J.⁸

32
- 0032645533
- ASUSEE. 0169-4332
- L. Liszkay, K. Havancsák, and Zs. Kajcsos, Appl. Surf. Sci. ASUSEE 0169-4332 149, 181 (1999).
- (1999) Appl. Surf. Sci. , vol.149 , pp. 181
- Liszkay, L.¹ Havancsák, K.² Kajcsos, Zs.³

33
- 0011925369
- PRBMDO 0163-1829 10.1103/PhysRevB.44.12180
- P. J. Simpson, M. Vos, I. V. Mitchell, C. Wu, and P. J. Schultz, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.44.12180 44, 12180 (1991).
- (1991) Phys. Rev. B , vol.44 , pp. 12180
- Simpson, P.J.¹ Vos, M.² Mitchell, I.V.³ Wu, C.⁴ Schultz, P.J.⁵

34
- 18744437293
- PRBMDO 0163-1829 10.1103/PhysRevB.68.165332
- M. Fujinami, T. Miyagoe, T. Sawada, R. Suzuki, T. Ohdaira, and T. Akahane, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.68.165332 68, 165332 (2003).
- (2003) Phys. Rev. B , vol.68 , pp. 165332
- Fujinami, M.¹ Miyagoe, T.² Sawada, T.³ Suzuki, R.⁴ Ohdaira, T.⁵ Akahane, T.⁶

35
- 4344677632
- MSBTEK 0921-5107
- E. Oliviero, S. Peripolli, P. F. P. Fichter, and L. Amaral, Mater. Sci. Eng., B MSBTEK 0921-5107 112, 111 (2004).
- (2004) Mater. Sci. Eng., B , vol.112 , pp. 111
- Oliviero, E.¹ Peripolli, S.² Fichter, P.F.P.³ Amaral, L.⁴

36
- 2142821480
- PRBMDO 0163-1829 10.1103/PhysRevB.69.115205
- V. Ranki, A. Pelli, and K. Saarinen, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.69.115205 69, 115205 (2004).
- (2004) Phys. Rev. B , vol.69 , pp. 115205
- Ranki, V.¹ Pelli, A.² Saarinen, K.³

37
- 0001359527
- PLRBAQ 0556-2805 10.1103/PhysRevB.13.2511
- G. D. Watkins, Phys. Rev. B PLRBAQ 0556-2805 10.1103/PhysRevB.13.2511 13, 2511 (1976).
- (1976) Phys. Rev. B , vol.13 , pp. 2511
- Watkins, G.D.¹

38
- 0001176545
- PRBMDO 0163-1829 10.1103/PhysRevB.40.11764
- P. Mascher, S. Dannefaer, and D. Kerr, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.40.11764 40, 11764 (1989).
- (1989) Phys. Rev. B , vol.40 , pp. 11764
- Mascher, P.¹ Dannefaer, S.² Kerr, D.³

39
- 0001659563
- PRBMDO. 0163-1829. 10.1103/PhysRevB.34.8709
- B. G. Svensson and L. L. Lindström, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.34.8709 34, 8709 (1986).
- (1986) Phys. Rev. B , vol.34 , pp. 8709
- Svensson, B.G.¹ Lindström, L.L.²

40
- 4243678567
- PRBMDO. 0163-1829. 10.1103/PhysRevB.62.4535
- A. Nylandsted Larsen, J. J. Goubet, P. Mejlholm, J. Sherman Christensen, M. Fanciulli, H. P. Gunnlaugsson, G. Weyer, J. Wulff Petersen, A. Resende, M. Kaukonen, R. Jones, S. Öberg, P. R. Briddon, B. G. Svensson, J. L. Lindström, and S. Dannefaer, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.62.4535 62, 4535 (2000).
- (2000) Phys. Rev. B , vol.62 , pp. 4535
- Nylandsted Larsen, A.¹ Goubet, J.J.² Mejlholm, P.³ Sherman Christensen, J.⁴ Fanciulli, M.⁵ Gunnlaugsson, H.P.⁶ Weyer, G.⁷ Wulff Petersen, J.⁸ Resende, A.⁹ Kaukonen, M.¹⁰ Jones, R.¹¹ Öberg, S.¹² Briddon, P.R.¹³ Svensson, B.G.¹⁴ Lindström, J.L.¹⁵ Dannefaer, S.¹⁶

41
- 0000592917
- PRBMDO. 0163-1829. 10.1103/PhysRevB.58.10363
- A. Polity, F. Börner, S. Huth, S. Eichler, and R. Krause-Rehberg, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.58.10363 58, 10363 (1998).
- (1998) Phys. Rev. B , vol.58 , pp. 10363
- Polity, A.¹ Börner, F.² Huth, S.³ Eichler, S.⁴ Krause-Rehberg, R.⁵

42
- 0348017032
- APPLAB 0003-6951 10.1063/1.1401782
- R. S. Brusa, W. Deng, G. P. Karwasz, A. Zecca, and D. Pliszka, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1401782 79, 1492 (2001).
- (2001) Appl. Phys. Lett. , vol.79 , pp. 1492
- Brusa, R.S.¹ Deng, W.² Karwasz, G.P.³ Zecca, A.⁴ Pliszka, D.⁵

43
- 0642296086
- PRBMDO 0163-1829 10.1103/PhysRevB.22.6135
- S. Dannefaer, S. Kupca, B. G. Hogg, and D. P. Kerr, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.22.6135 22, 6135 (1980).
- (1980) Phys. Rev. B , vol.22 , pp. 6135
- Dannefaer, S.¹ Kupca, S.² Hogg, B.G.³ Kerr, D.P.⁴

44
- 0000412810
- PRBMDO. 0163-1829. 10.1103/PhysRevB.39.10162
- J. Mäkinen, C. Corbel, P. Hautojärvi, P. Moser, and F. Pierre, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.39.10162 39, 10162 (1989).
- (1989) Phys. Rev. B , vol.39 , pp. 10162
- Mäkinen, J.¹ Corbel, C.² Hautojärvi, P.³ Moser, P.⁴ Pierre, F.⁵

45
- 0001640934
- JCOMEL. 0953-8984. 10.1088/0953-8984/4/22/012
- J. Mäkinen, P. Hautojärvi, and C. Corbel, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/4/22/012 4, 5137 (1992).
- (1992) J. Phys.: Condens. Matter , vol.4 , pp. 5137
- Mäkinen, J.¹ Hautojärvi, P.² Corbel, C.³

46
- 0031071197
- JAPNDE 0021-4922 10.1143/JJAP.36.605
- A. Kawasuso and S. Okada, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.36.605 36, 605 (1997).
- (1997) Jpn. J. Appl. Phys., Part 1 , vol.36 , pp. 605
- Kawasuso, A.¹ Okada, S.²

47
- 0034890511
- PRBMDO. 0163-1829. 10.1103/PhysRevB.63.165202
- J. Nissilä, K. Saarinen, and P. Hautojärvi, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.63.165202 63, 165202 (2002).
- (2002) Phys. Rev. B , vol.63 , pp. 165202
- Nissilä, J.¹ Saarinen, K.² Hautojärvi, P.³

48
- 0000394550
- PRBMDO 0163-1829 10.1103/PhysRevB.41.9980
- M. J. Puska, C. Corbel, and R. M. Nieminen, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.41.9980 41, 9980 (1990).
- (1990) Phys. Rev. B , vol.41 , pp. 9980
- Puska, M.J.¹ Corbel, C.² Nieminen, R.M.³

49
- 1642579533
- DRMTE3 0925-9635
- S. Dannefaer and D. Kerr, Diamond Relat. Mater. DRMTE3 0925-9635 13, 157 (2004).
- (2004) Diamond Relat. Mater. , vol.13 , pp. 157
- Dannefaer, S.¹ Kerr, D.²

50
- 0342691475
- JAPIAU 0021-8979 10.1063/1.348420
- S. Dannefaer, P. Mascher, and D. Kerr, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.348420 69, 4080 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 4080
- Dannefaer, S.¹ Mascher, P.² Kerr, D.³

51
- 0000826207
- PRBMDO 0163-1829 10.1103/PhysRevB.60.1729
- S. Dannefaer and V. Avalos, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.60.1729 60, 1729 (1999).
- (1999) Phys. Rev. B , vol.60 , pp. 1729
- Dannefaer, S.¹ Avalos, V.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.