Optimization of measurement parameters in Doppler broadening spectroscopy

Applied Surface Science

Volumn 194, Issue 1-4, 2002, Pages 255-259

  Pi, X D ^a   Burrows, C P ^a   Coleman, P G ^a  

^a University of Bath   (United Kingdom)

Author keywords

Annihilation radiation; Doppler broadening spectroscopy; Silicon; Vacancies

Indexed keywords

COMPUTER SIMULATION; DOPPLER EFFECT; ION IMPLANTATION; OPTIMIZATION; POSITRON ANNIHILATION SPECTROSCOPY; SEMICONDUCTING SILICON;

DOPPLER BROADENING SPECTROSCOPY;

CRYSTAL DEFECTS;

EID: 0037150618     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00127-7     Document Type: Conference Paper

References (13)