Divacancy and resistivity profiles in n-type Si implanted with 1.15-MeV protons

Physical Review B - Condensed Matter and Materials Physics

Volumn 55, Issue 15, 1997, Pages 9598-9608

  Kauppinen, H ^a   Corbel, C ^a   Skog, K ^b   Saarinen, K ^b   Laine, T ^b   Hautojarvi P ^b  

^a Centre National de la Recherche Scientifique   (France)

^b AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000650719     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.55.9598     Document Type: Article

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