Quantitative XPS analysis of hydrosilated 1-alkene and 1-alkyne at terraced, dihydrogen-terminated, 1×1 (100) silicon

Surface and Interface Analysis

Volumn 38, Issue 3, 2006, Pages 126-138

  Cerofolini, G F ^a   Galati, C ^a   Reina, S ^a   Renna, L ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

(100) silicon; Alkene and alkyne hydrosilation; Angle resolved XPS; Depth profiling; Silicon functionalization

Indexed keywords

CARBON; HYDROCARBONS; IMPURITIES; OXIDATION; SILICON; SUBSTRATES; THIN FILMS;

ALKENE AND ALKYNE HYDROSILATION; ANGLE-RESOLVED XPS; DEPTH PROFILING; SILICON FUNCTIONALIZATION;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33644777539     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2211     Document Type: Article

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