A noble suspended type thin film resonator (STFR) using the SOI technology

Sensors and Actuators, A: Physical

Volumn 89, Issue 3, 2001, Pages 255-258

  Kim, Hyun Ho ^a,b   Ju, Byeong Kwon ^a   Lee, Yun Hi ^a   Lee, Si Hyung ^a   Lee, Jeon Kook ^a   Kim, Soo Won ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

AlN; Piezoelectric; SOI technology; Suspended; Thin film resonator

Indexed keywords

ALUMINUM NITRIDE; CHROMIUM; ETCHING; MICROMACHINING; NATURAL FREQUENCIES; SILICON ON INSULATOR TECHNOLOGY; THIN FILM DEVICES; THIN FILMS;

SUSPENDED TYPE THIN FILM RESONATORS (STFR);

ACOUSTIC RESONATORS;

EID: 0035871583     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00551-3     Document Type: Article

References (8)

1. Micromachined devices for wireless communications
2. Compact FBAR filters offer low loss performance
3. High-Q microwave acoustic resonators and filters
4. Thin-film resonator ladder filter
5. Acoustic bulk wave composite resonators
6. Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator
7. A sealed cavity TFR process for RF bandpass filters