Modelling of a cantilever non-symmetric piezoelectric bimorph

Journal of Micromechanics and Microengineering

Volumn 13, Issue 6, 2003, Pages 832-844

  Brissaud, Michel ^a   Ledren, Sarah ^a   Gonnard, P ^a  

^a University de Lyon   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINA; COMPUTER SIMULATION; ELECTRODES; FINITE ELEMENT METHOD; PERMITTIVITY; SENSORS;

PIEZOELECTRIC BIMORPHS;

PIEZOELECTRIC DEVICES;

EID: 0242637017     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/306     Document Type: Article

References (33)

1. IRE Standard 1961 Measurements of piezoelectric ceramics Proc. IRE Standards on Piezoelectric Crystals pp 1161-9
2. IEEE Standards on piezoelectricity 1984 Special issue of Trans. Sonics and Ultrason., SU no 31-2 pt II ANSI-IEEE Std 176 (New York: IEEE)
3. Brissaud M 1991 Characterization of piezoceramics IEEE Trans. Ultrason. Ferroelectr. Freq. Control UFFC 38-6 603-17
4. Le Dren S, Gonnard P, Lebrun L and Troccaz M 1998 Electromechanical characterization and modelling of piezoelectric thick films J. Physique IV 8 171-4
5. Brissaud M, Le Dren S and Gonnard P 1998 Characterization of thick piezoelectric films Int. Conf. Cognition to Modelling, CCM'98 (AMSE, Lyon, France) sec 12, pp 8-11
6. Le Dren S 2000 Elaboration de couches épaisses piézoelectriques déposées sur substrats pour des applications microtechniques Dissertation Thesis, INSAL
7. Smits J G 1984 Equivalent circuit for end-loaded piezoelectric bimorph actuators Ferroelectrics 60 141-8
8. Wang X, Ehlers C and Neitzel M 1996 Dynamic analysis of piezoelectric actuator bonded on beam 3rd ICIM/ECSSM'96 (Lyon) pp 883-90
9. Smits J G, Dalke S I and Cooney T K 1991 The constituent equations of piezoelectric bimorphs Sensors Actuators A 28 41-61
10. Ballato A and Smits J G 1991 Network representation for piezoelectric bimorphs IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38-6 595-602
11. Smits J G, Choi W S and Ballato A 1997 Resonance and antiresonance of symmetric piezoelectric flexors IEEE Trans. Ultrason. Ferroelectr. Freq. Control 44-2 250-8
12. Coughlin M F, Stamenovic D and Smits J G 1997 Determining spring stiffness by resonance frequency of cantilevered piezoelectric bimorphs IEEE Trans. Ultrason. Ferroelectr. Freq. Control 44-1730-2
13. Devine S D and Robinson W H 1998 Flexural composite oscillators for the measurement of anelastic and elastic properties of solids at frequencies of 1 to 10 kHz IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45-1 11-22
14. Wang Q M, Du X H, Xu B and Cross L E 1999 Electromechanical coupling and output efficiency of piezoelectric bending actuators IEEE Trans. Ultrason. Ferroelectr. Freq. Control 46-3 638-46
15. Deschanvres J L, Rey P, Delabouglise G, Labeau M, Joubert J C and Peuzin J C 1992 Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications Sensors Actuator A 3343-5
16. Toyama M, Kubo R, Takata E, Tanaka K and Ohwada K 1994 Characterization of piezoelectric properties of PZT thin films deposited on Si by ECR sputtering Sensors Actuators A 45 125-9
17. Naik R S, Lutsky J L J and Reif R 1998 Electromechanical coupling constant extraction if thin film piezoelectric materials using a bulk acoustic wave resonator IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45-1257-63
18. Verardi P, Dinescu M, Craciun F and Carpentieri M 1998 Ferroelectric PZT/Si structure for integrated sensor applications 2nd European Meeting on Integrated Ferroelectric, J. Physique IV 8 187-90
19. Cattan E, Mollier A, Vélu G and Remiens D 1998 Effect of polling treatment on 631 piezoelectric constant of sputtered PZT thin films 2nd European Meeting on Integrated Ferroelectrics, J. Physique IV 8 229-32
20. Gaucher P, Eichner D, Hector J and von Munch W 1998 Piezoelectric bimorph cantilever for actuating and sensing applications Proc. 2nd European Meeting on Integrated Ferroelectrics, J. Physique IV 8 235-38
21. Walter V, Le Moal P, Delobelle P and Joseph E 2000 Electromechanical characterization of screen-printed thick films 5th European Conf. Smart Structures and Materials (Glasgow) pp 121-8
22. Mason W P 1948 Electromechanical Transducers and Wave Filters (New York: Van Nostrand)
23. Timoshenko S 1954 Théorie des vibrations, Béranger
24. Jullien Y 1971 Vibration des systèmes continus, GALF
25. Leissa A 1993 Vibration of plates, Reprint Acoustical Society of America
26. Martin G 1954 Determination of equivalent circuit constants of piezoelectric resonators of moderately low Q by absolute admittance measurements J. Acoust. Soc. Am. 26-3 413-20
27. Lucacs M, Olding T, Sayer M and Sherrit S 1998 Thickness mode resonance of PZT coatings on a substrate Proc. Symp. Mat. Res. Soc. vol 493 pp 397-402
28. 3 ceramics IEEE Trans. Ultrason. Ferroelectr. Freq. Control 36-4 424-33
29. 33 Proc. 11th IEEE Int. Symp on Application of Ferroelectrics (Montreux, Switzerland) pp 93-6
30. Simon L, Gonnard P and Lebrun L 2002 Electromechanical characterization of thick PT and PZT films Int. Joint Conf. on Applications of Ferroelectrics, IFFF2002 (Nara, Japan)
31. ATILA user's manual 1995 ISEN Acoustics Laboratory
32. El Nachef S, Brissaud M and Noterman D 1991 Three dimensional characterization of complex parameters of piezoelectric disks using an identification technique Proc. Ultrason. Int. vol 91 pp 399-402
33. El Nachef S, Brissaud M and Noterman D 1992 Limitations du modèle de Mason pour l'identification des paramètres complexes des céramiques piézoélectriques ACUSTICA 76 209-22