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Volumn 13, Issue 6, 2003, Pages 832-844

Modelling of a cantilever non-symmetric piezoelectric bimorph

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINA; COMPUTER SIMULATION; ELECTRODES; FINITE ELEMENT METHOD; PERMITTIVITY; SENSORS;

EID: 0242637017     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/306     Document Type: Article
Times cited : (65)

References (33)
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    • Smits, J.G.1
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    • Wang X, Ehlers C and Neitzel M 1996 Dynamic analysis of piezoelectric actuator bonded on beam 3rd ICIM/ECSSM'96 (Lyon) pp 883-90
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    • Wang, X.1    Ehlers, C.2    Neitzel, M.3
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    • Devine, S.D.1    Robinson, W.H.2
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    • Deschanvres J L, Rey P, Delabouglise G, Labeau M, Joubert J C and Peuzin J C 1992 Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications Sensors Actuator A 3343-5
    • (1992) Sensors Actuator A , vol.33 , pp. 43-45
    • Deschanvres, J.L.1    Rey, P.2    Delabouglise, G.3    Labeau, M.4    Joubert, J.C.5    Peuzin, J.C.6
  • 16
    • 0028545960 scopus 로고
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    • Toyama M, Kubo R, Takata E, Tanaka K and Ohwada K 1994 Characterization of piezoelectric properties of PZT thin films deposited on Si by ECR sputtering Sensors Actuators A 45 125-9
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.