Study on the tip-deflection of a piezoelectric bimorph cantilever in the static state

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 530-534

  Huang, C ^a   Lin, Y Y ^a   Tang, T A ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BOUNDARY CONDITIONS; ELECTRIC CONVERTERS; ELECTRIC POTENTIAL; ELECTRODES; MATHEMATICAL MODELS; MULTILAYERS; OPTIMIZATION; PIEZOELECTRIC DEVICES; THIN FILMS;

BIMORPH-TYPE BENDING ACTUATORS; CANTILEVER VIBRATIONS; STATICS; TIP DEFLECTION;

ACTUATORS;

EID: 2342590742     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/013     Document Type: Article

References (11)

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