Simulation, dynamic testing and design of micromachined flexible joints

Journal of Micromechanics and Microengineering

Volumn 11, Issue 3, 2001, Pages 209-216

  Fettig, Heiko ^a   Wylde, James ^b   Hubbard, Ted ^a   Kujath, Marek ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

^b NORTEL NETWORKS   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; COMPUTER SIMULATION; FLEXIBLE STRUCTURES; KINEMATICS; LASER APPLICATIONS; MICROMACHINING; POLYSILICON; REFLECTION; RESONANCE; STIFFNESS;

MICROMACHINED FLEXIBLE JOINTS; PSEUDO CLASSICAL KINEMATICS;

JOINTS (STRUCTURAL COMPONENTS);

EID: 0035337219     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/3/308     Document Type: Article

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