Visualization of MeV ion impacts in Si using scanning capacitance microscopy

Physical Review B - Condensed Matter and Materials Physics

Volumn 73, Issue 8, 2006, Pages

  Vines, Lasse ^d   Monakhov, Edouard ^a   Svensson, Bengt G ^a   Jensen, Jens ^b   Hallén, Anders ^c   Kuznetsov, Andrej Yu ^a  

^a UNIVERSITY OF OSLO   (Norway)

^b UPPSALA UNIVERSITY   (Sweden)

^c ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33244462157     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.73.085312     Document Type: Article

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