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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 187, Issue 2, 2002, Pages 220-230

AFM study of swift gold ion irradiated silicon

(3) Srivastava, P C a Ganesan, V b Sinha, O P a

a BANARAS HINDU UNIVERSITY (India)

b University Campus (India)

Author keywords

AFM; Irradiation and silicon; Swift gold ion

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; GOLD; HEAVY IONS; ION BOMBARDMENT; MASS TRANSFER; SEMICONDUCTOR DOPING; SHRINKAGE; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS;

ION IRRADIATION;

SEMICONDUCTING SILICON;

EID: 0036467282 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00931-4 Document Type: Article

Times cited : (30)

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