Magnetically actuated micromirror and measurement system for motion characteristics using specular reflection

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 19-25

  Okano, Yoko ^a   Hirabayashi, Yasuo ^a  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Hard magnetic thin film; Magnetic actuation; Micromirror; Optical scanner; SOI wafer

Indexed keywords

MAGNETIC THIN FILMS; MICROACTUATORS; MICROMACHINING; MIRRORS; RESONANCE; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; VACUUM;

MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036243486     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.991395     Document Type: Article

References (11)

1. The degital micromirror device and its application to projection displays
2. An electrostatically excited 2D-micro-scaning-mirror with an in-plane configuration of the driving electrodes
3. The 2-dimensional micro scanner integlated with PZT thin film actuator
4. Slicon micro-optical scanner
5. Optical cross-connect switch by silicon micromachining
6. Magnetically actuated, addressable microstructures
7. Electromagnetically actuated micromirror of moving-magnet type
8. Nanometer resoltion of three-dimensional motions using video interference microscopy
9. Mechanical behavior of ultrathin microcantilever
10. Multi-dimensional MEMES motion characterization using laser vibrometry