Bulk micromachined electrostatic beam steering micromirror array

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 15-16

  Dokmeci, M R ^a   Bakshi, S ^a   Waelti, M ^a   Pareek, A ^a   Fung, C ^a   Mastrangelo, C H ^a  

^a Corning Intellisense ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; GOLD; MECHANICAL DRIVES; MIRRORS; MOEMS; WAFER BONDING;

ANODIC BONDING; BEAM-STEERING; BULK- MICROMACHINING; BULK-MICROMACHINED; MICROMIRROR ARRAY; PARALLEL-PLATE ELECTRODES; SILICON MIRRORS; VOLTAGE DRIVE;

SILICON WAFERS;

EID: 84891675593     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031421     Document Type: Conference Paper

References (7)

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5. H. Toshiyoshi et al, "Linearization of electrostatically actuated micromachined 2D optical scanner", IEEE J. Microelectromechanical Systems, vol. 10, pp. 205-214, 2001
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