Silicon micro-optical scanner

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 284-290

  Asada, Norihiro ^a   Takeuchi, Masaru ^a   Vaganov, Vladimir ^b   Belov, Nickolai ^c   In'T Hout, Sebastiaan ^c   Sluchak, Igor ^c  

^a Visionary Business Center   (Japan)

^b MegaSense   (United States)

^c EG&G   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY UTILIZATION; MIRRORS; NATURAL FREQUENCIES; SILICON SENSORS;

SILICON MICRO-OPTICAL SCANNERS (SMOS);

MICROSENSORS;

EID: 0033750017     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00352-6     Document Type: Article

References (5)

1. Asada N., Matsuki H., Minami K., Esashi M. Silicon micromachined galvano optical scanner. IEEE Trans. Magn. 30(6):1994;4647-4649.
2. Kiang M.-H., Solgaard O., Lau K.Y., Muller R.S. Electrostatic combdrive-actuated micromirrors for laser beam scanning and positioning. J. Microelectromech. Syst. 7:1998;38-47.
3. Ferreira L.O.S., Moehlecke S. A silicon micromechanical galvanometric scanner. Sens. Actuators. 73:1999;252-260.
4. Young W. Roark's Formulas for Stress and Strain. 1989;345. N.Y.
5. Neukermans et al., Micromachined torsional scanner, US Patent 5,629,790, 1997.