Extraction of negative ions from pulsed electronegative inductively coupled plasmas having a radio-frequency substrate bias

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 534-544

  Subramonium, Pramod ^a,b   Kushner, Mark J ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b Novellus Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; CARRIER CONCENTRATION; ELECTRIC FIELDS; ELECTRIC POTENTIAL; HEATING; MICROELECTRONICS; NEGATIVE IONS; PLASMA DENSITY; RADIO FREQUENCY AMPLIFIERS; SUBSTRATES;

ELECTRONEGATIVITY; ION ACCELERATION; PLASMA TRASITIONS; THERMAL ENERGIES;

INDUCTIVELY COUPLED PLASMA;

EID: 3142552572     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1690251     Document Type: Article

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