Generation and extinction characteristics of negative ions in pulse-time-modulated electron cyclotron resonance chlorine plasma

Plasma Sources Science and Technology

Volumn 6, Issue 3, 1997, Pages 398-404

  Mieno, T ^a   Samukawa, S ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHLORINE; ELECTRON CYCLOTRON RESONANCE; GLOW DISCHARGES; IONS; MICROWAVES; PLASMA ETCHING; PLASMA FLOW; PLASMA SHEATHS; PLASMA SOURCES; PULSE TIME MODULATION; WAVE PLASMA INTERACTIONS;

ELECTRONCYCLOTRON RESONANCE PLASMAS; NEGATIVE IONS EXTINCTION IN PLASMA; NEGATIVE IONS GENERATION IN PLASMA;

PLASMAS;

EID: 0031210506     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/6/3/017     Document Type: Article

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