Pulsed inductively coupled chlorine plasmas in the presence of a substrate bias

Applied Physics Letters

Volumn 79, Issue 14, 2001, Pages 2145-2147

  Subramonium, Pramod ^a   Kushner, Mark J ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035473564     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1406139     Document Type: Article

References (10)

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