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Volumn 19, Issue 1, 2001, Pages 76-86
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Wave propagation and power deposition in magnetically enhanced inductively coupled and helicon plasma sources
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
CALCULATIONS;
DEPOSITION;
ELECTROMAGNETIC FIELDS;
ELECTROSTATICS;
HEATING;
MAGNETIC FIELDS;
MATHEMATICAL MODELS;
WAVE PROPAGATION;
HELICON PLASMA SOURCE;
MAGNETICALLY ENHANCED INDUCTIVELY COUPLED PLASMA;
POWER DEPOSITION;
MAGNETOPLASMA;
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EID: 0035104187
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1329122 Document Type: Article |
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Times cited : (55)
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References (2)
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