The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films

Thin Solid Films

Volumn 498, Issue 1-2, 2006, Pages 152-157

  Huang, Jun Hang ^a   Liu, Chuan Pu ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Hydrogen; Sputter; Zn1 xMgxO; ZnO:H

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; HYDROGEN; MAGNESIUM PRINTING PLATES; MAGNETRON SPUTTERING; MORPHOLOGY; OPTICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

HYDROGEN DOPING; ZINC OXIDE FILMS; ZN1-XMGXO; ZNO:H;

THIN FILMS;

EID: 30944433194     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.066     Document Type: Conference Paper

References (23)

1. N. Horio, M. Hiramatsu, M. Nawata, K. Imaedab, and T. Toriib Vacuum 51 1998 719
2. N. Jayadev, S.R. Sainkar, R.N. Karekar, and R.C. Aiyer Thin Solid Films 325 1998 254
3. D.E.L. Jenkins, M.J. Cunningham, G. Velu, and D. Remiens Sens. Actuators, A 63 1997 135
4. K. Tominaga, T. Takao, A. Fukushima, T. Moriga, and I. Nakabayashi Vacuum 66 2002 505
5. J. Chen, W.Z. Shen, N.B. Chen, D.J. Qiu, and H.Z. Wu J. Phys., Condens. Matter 15 2003 475
6. Wen-Ting Chiou, Wan-Yu Wu, and Jyh-Ming Ting Diamond Relat. Mater. 12 2003 1841
7. M.S. Tomar, R. Melgarejo, P.S. Dobal, and R.S. Katiyar J. Mater. Res. 16 2001 903
8. T. Minemoto, T. Negami, S. Nishiwaki, H. Takakura, and Y. Hamakawa Thin Solid Films 372 2000 173
9. S.H. Jeong, S. Kho, D. Jung, S.B. Lee, and J.-H. Boo Surf. Coat. Technol. 174 2003 187
10. Baosheng Sang, Akira Yamada, and Makoto Konagai Sol. Energy Mater. Sol. Cells 48 1997 19
11. M. Joseph, H. Tabata, H. Saeki, K. Ueda, and T. Kawai Physica B 302 2001 140
12. Kyu-Hyun Bang, Deuk-Kyu Hwang, Min-Chul Park, Young-Don Ko, Ilgu Yun, and Jae-Min Myoung Appl. Surf. Sci. 210 2003 177
13. Y.R. Ryu, S. Zhu, D.C. Look, J.M. Wrobel, H.M. Jeong, and H.W. White J. Cryst. Growth 216 2000 330
14. P. Bhattacharya, R.R. Das, and R.S. Katiyar Appl. Phys. Lett. 83 2003 2010
15. W.I. Park, Gyu-Chul Yi, and H.M. Jang Appl. Phys. Lett. 79 2001 2022
16. A. Ohtomo, M. Kawasaki, T. Koida, K. Masubuchi, and H. Koinuma Appl. Phys. Lett. 72 1998 2466
17. E.R. Segnit, and A.E. Holland J. Am. Ceram. Soc. 48 1965 409
18. Z. Zhou, K. Kato, T. Komaki, M. Yoshino, H. Yukawa, and M. Morinaga Int. J. Hydrogen Energy 29 2004 323
19. M. Sano, K. Miyamoto, H. Kato, and T. Yao J. Appl. Phys. 95 2004 5527
20. Chris G. Van de Walle Phys. Rev. Lett. 85 2000 1012
21. K. Ip, M.E. Overberg, Y.W. Heo, D.P. Norton, S.J. Pearton, C.E. Stutz, S.O. Kucheyev, C. Jagadish, J.S. Williams, B. Luo, F. Ren, D.C. Look, and J.M. Zavada Solid-State Electron. 47 2003 2255
22. G.J. Exarhos, A. Rose, and C.F. Windisch Jr. Thin Solid Films 308 1997 56
23. Ji Nan Zeng, Juay Kiang Low, Zhong Min Ren, Thomas Liew, and Yong Feng Lu Appl. Surf. Sci. 197 2002 362