Preparation of zinc oxide/metal oxide multilayered thin films for low-voltage varistors

Vacuum

Volumn 51, Issue 4, 1998, Pages 719-722

  Horio, N ^a   Hiramatsu, M ^a   Nawata, M ^a   Imaeda, K ^b   Torii, T ^b  

^a MEIJO UNIVERSITY   (Japan)

^b NGK SPARK PLUG CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; ELECTRIC CURRENT MEASUREMENT; EVAPORATION; GOLD; PRASEODYMIUM COMPOUNDS; QUARTZ; SPUTTERING; THIN FILMS; VACUUM APPLICATIONS; VARISTORS; VOLTAGE MEASUREMENT; ZINC OXIDE;

PRASEODYMIUM OXIDE; VACUUM EVAPORATION;

MULTILAYERS;

EID: 0032309493     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00293-0     Document Type: Article

References (4)

1. Yano, Y., Shirakawa, Y. and Morooka, H., J. Ceramic Soc. Jpn., 1992, 100, 547.
2. Levinson, L. M. and Philipp, H. R., Zinc Oxide Varistors - A Review. Bull. American Ceramic Soc., 1986, 65, 639.
3. Sze, S.M., Semiconductor Devices, Physics and Technology, John Wiley & Sons, New York, 1985.
4. Hiramatsu, M., Imaeda, K., Horio, N. and Nawata, M., (submitted) J. Vac. Sci. Technol. A.