Formation of p-type ZnO film on InP substrate by phosphor doping

Applied Surface Science

Volumn 210, Issue 3-4, 2003, Pages 177-182

  Bang, Kyu Hyun ^a   Hwang, Deuk Kyu ^a   Park, Min Chul ^a   Ko, Young Don ^a   Yun, Ilgu ^a   Myoung, Jae Min ^a  

^a Yonsei University   (South Korea)

Author keywords

Diffusion; Homojunction; rf magnetron sputtering; ZnO

Indexed keywords

DEPOSITION; DIFFUSION; DOPING (ADDITIVES); ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; PHOSPHORS; SEMICONDUCTING INDIUM PHOSPHIDE; SURFACE REACTIONS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

DOPANT SOURCES;

THIN FILMS;

EID: 0037445975     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00151-X     Document Type: Article

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