Spectroscopic characterization of processing-induced property changes in doped ZnO films

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 56-62

  Exarhos, Gregory J ^a   Rose, Aimee ^a   Windisch Jr , Charles F ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

Characterization; Doped ZnO films; Film deposition parameters; Processing induced changes; Spectroscopy

Indexed keywords

CONDUCTIVE FILMS; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELLIPSOMETRY; INFRARED RADIATION; OPTICAL PROPERTIES; REDUCTION; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; ZINC OXIDE;

FREE CARRIER ABSORPTION; SOLUTION DEPOSITED FILMS;

OPTICAL FILMS;

EID: 0031244940     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00536-1     Document Type: Article

References (17)

1. R. Wang, A.W. Sleight, Chem. Mater., 8 (1996) 433.
2. J. Hu, R.G. Gordon, Solar Cells, 30 (1991) 437.
3. S. Takada, J. Appl. Phys., 73(10) (1993) 4739.
4. P. Pushparajah, A.K. Arof, S. Radhakrishnat, J. Appl. Phys. D Appl. Phys., 27 (1994) 1518.
5. T. Minami, H. Sato, H. Sonohara, S. Takata, T. Miyata, I. Fukuda, Thin Solid Films, 253 (1994) 14.
6. K. Tominaga, M. Kataoka, T. Ueda, M. Chong, Y. Shintani, I. Mori, Thin Solid Films, 253 (1994) 9.
7. M. Azuma, K. Hashimoto, M. Hiramoto, M. Watanabe, T. Sakata, J. Electrochem. Soc., 137 (1990) 2157.
8. R. Shiratsuchi, K. Hongo, G. Nogami, S. Ishimaru, J. Electrochem. Soc., 139 (1992) 2544.
9. L.R. Pederson, L.A. Chick, G.J. Exarhos, Metal Oxide Ceramic Powders and Thin Films and Methods of Making Same, US Patent #5 114 702 19 May 1992.
10. C.A. Arguello, D.L. Rousseau, S.P.S. Porto, Phys. Rev., 1813 (1969) 1351.
11. J.C. Manifacier, J. Gasiot, J.P. Pillard, J. Phys. E Sci. Instrum., 9 (1976) 4002.
12. UVISEL Ellipsometric Software, ver. 4.15, Instruments, S.A./Jobin-Yvon, Edison, NJ, 1996.
13. G.J. Exarhos, S.K. Sharma, Thin Solid Films, 270 (1995) 27.
14. S. Major, A. Banerjee, K.L. Chopra, Thin Solid Films, 125 (1985) 179.
15. H. Lund, M.M. Baizer, Organic Electrochemistry, 3rd Edition, Marcel Dekker, Inc., New York, 1991, p. 295.
16. M.V. Klein, in: M. Cardona, (Ed.) Light Scattering in Solids, Springer-Verlag, Berlin/Heidelberg/New York, 1975.
17. B.H. Bairamov, A. Heinrich, G. Irmer, V.V. Toporov, E. Ziegler, Phys. Stat. Sol., (B) 119 (1983) 227.