Periodic pillar structures by Si etching of multilayer GeSi/Si islands

Applied Physics Letters

Volumn 87, Issue 26, 2005, Pages 1-3

  Zhong, Z ^a,c   Katsaros, G ^a   Stoffel, M ^a   Costantini, G ^a   Kern, K ^a   Schmidt, O G ^a   Jin Phillipp, N Y ^b   Bauer, G ^c  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

COALESCENCE; HETEROJUNCTIONS; SILICON; STRAIN; SUBSTRATES;

KOH SOLUTIONS; MULTILAYER GESISI ISLANDS; SELECTIVE ETCHING; THIN SPACER LAYERS;

ETCHING;

EID: 29744451556     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2150278     Document Type: Article

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