Stiction recovery of microcantilevers by using excimer laser irradiation

7th AIAA/ASME Joint Thermophysics and Heat Transfer Conference

Volumn , Issue , 1998, Pages

  Fushinobu, Kazuyoshi ^a,b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Department of Mechanical and Intelligent Systems Engineering ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; EXCIMER LASERS; HEAT TRANSFER; IRRADIATION; MEMS; MICROMACHINING; RECOVERY; SAPPHIRE; STICTION; SURFACE MICROMACHINING;

CARRIER TEMPERATURE; DIFFERENT MECHANISMS; DRYING PROCESS; KRF EXCIMER LASER; LATTICE TEMPERATURES; MICRO-CANTILEVERS; REGULAR SURFACES; TI: SAPPHIRE LASER;

COMPOSITE MICROMECHANICS;

EID: 84983189127     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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