Use of thermal cycling to reduce adhesion of OTS coated MEMS cantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 151-162

  Ali, Mubassar ^a   Phinney, Leslie M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Adhesion; MEMS reliability; OTS; Stiction; Surface micromachining; Thermal cycling

Indexed keywords

ADHESION; CANTILEVER BEAMS; HYDROPHOBICITY; MICROMACHINING; SELF ASSEMBLY; SILANES; STICTION; SURFACE TOPOGRAPHY; THERMAL CYCLING;

INTERFACIAL FORCES;

MICROELECTROMECHANICAL DEVICES;

EID: 0037721333     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472731     Document Type: Conference Paper

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