Ferroelectric properties of direct-patterned half-micron thick PZT film

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 548-552

  Bae, Sang Woo ^a   Park, Hyung Ho ^a   Kim, Tae Song ^b  

^a Yonsei University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Direct patterning; Ferroelectric; Multi layer film; Photoresist free; PZT

Indexed keywords

DIRECT-PATTERNING; FERROELECTRIC PROPERTIES; MULTI-LAYER FILMS; PHOTORESIST-FREE; PZT;

COATED MATERIALS; DRY ETCHING; FERROELECTRIC MATERIALS; SHRINKAGE; SIMULATED ANNEALING; THICK FILMS; THICKNESS CONTROL;

LEAD COMPOUNDS;

EID: 29144510058     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.06.015     Document Type: Article

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