Preparation of 0.5 μm thick self-patternable PZT films by sol-gel procedure for applying to the micro-detection system

Microelectronic Engineering

Volumn 70, Issue 1, 2003, Pages 73-77

  Hwang, Jae Seob ^a   Kim, Woo Sik ^a   Park, Hyung Ho ^a   Kim, Tae Song ^b  

^a Yonsei University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Micro detecting system; Photosensitizer; Self patternable PZT; Sol gel

Indexed keywords

CHEMICAL BONDS; LEAD COMPOUNDS; PHOTOSENSITIVITY; PYROELECTRICITY; SOL-GELS; SUBSTRATES; ULTRAVIOLET RADIATION;

ORGANIC BONDS;

MICROELECTRONIC PROCESSING;

EID: 0141531099     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00392-7     Document Type: Article

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