Fabrication and investigation of ultrathin, and smooth Pb(Zr,Ti)O3 films for miniaturization of microelectronic devices

Journal of Applied Physics

Volumn 92, Issue 12, 2002, Pages 7434-7441

  Hong, Jongin ^a   Song, Han Wook ^a   Hong, Seungbum ^b   Shin, Hyunjung ^c   No, Kwangsoo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Kookmin University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; FABRICATION; GRAIN SIZE AND SHAPE; HYSTERESIS; LASER APPLICATIONS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MICROELECTRONICS; PIEZOELECTRICITY; RESIDUAL STRESSES; SUBSTRATES; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

LASER REFLECTANCE METHOD;

ULTRATHIN FILMS;

EID: 0037115683     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1524307     Document Type: Article

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