Formation and characterization of self-patterned PZT film for applying to micro-mechanical detecting system

Ferroelectrics

Volumn 273, Issue , 2002, Pages 351-357

  Ha, Su Min ^a   Kim, Woo Sik ^a   Park, Hyung Ho ^a   Kim, Tae Song ^b  

^a Yonsei University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Photosensitive; PZT; Sol gel; UV irradiation

Indexed keywords

AMINES; ELECTRIC PROPERTIES; ETHANOL; FERROELECTRIC MATERIALS; MICROSTRUCTURE; PHOTOSENSITIVITY; POLARIZATION; PRECIPITATION (CHEMICAL); STABILIZERS (AGENTS); THIN FILMS; ULTRAVIOLET RADIATION;

MOLAR CONCENTRATION; PHOTOSENSITIVE; PZT; SOL-GEL;

PHOSPHORUS COMPOUNDS;

EID: 0141552013     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/713716372     Document Type: Conference Paper

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