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Volumn 117, Issue 1, 2005, Pages 137-142

The effect of intermediate anneal on the ferroelectric properties of direct-patternable PZT films

Author keywords

Direct patterning; Intermediate anneal; Piezoelectric; PZT; Sol gel

Indexed keywords

ANNEALING; ETCHING; FERROELECTRICITY; MICROSTRUCTURE; PEROVSKITE; SOL-GELS; THIN FILMS;

EID: 9644262575     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.05.033     Document Type: Article
Times cited : (18)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.