Evaluation of sensitive materials for integrated thermal flow sensors

IECON Proceedings (Industrial Electronics Conference)

Volumn 4, Issue , 2002, Pages 2681-2684

  Sabaté, Neus ^a   Cerdà, Judith ^b   Grácia, Isabel ^a   Berganzo, Javier ^c   Cané, Carles ^a   Morante, J R ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

^c JM Arizmendiarreta ^*  (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CALORIMETRY; DIELECTRIC FILMS; HEAT TRANSFER; NICKEL; PLATINUM; POLYSILICON; RESISTORS; TEMPERATURE MEASUREMENT; THIN FILMS;

ELECTRICAL STABILITY; INTEGRATED THERMAL FLOW SENSORS; SENSING RESISTORS; THERMAL ISOLATION;

SENSORS;

EID: 0036953667     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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