Measurement of Young's modulus and residual stress of micromembranes

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1996, Pages 125-129

  Ye, X Y ^a   Zhang, J H ^a   Zhou, Z Y ^a   Yang, Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; ELASTIC MODULI; FABRICATION; MECHANICAL VARIABLES MEASUREMENT; MEMBRANES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; RESIDUAL STRESSES; SILICON; THIN FILMS;

DEFLECTIONS; LOAD DEFLECTION BEHAVIOR; MICROMEMBRANES; POLYCRYSTALLINE SILICON; THIN FILM STRUCTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0030422261     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.1996.563412     Document Type: Conference Paper

References (12)

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