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Volumn , Issue , 2000, Pages 229-234

New failure mechanism in silicon nitride resonators

Author keywords

[No Author keywords available]

Indexed keywords

CRACK INITIATION; FAILURE ANALYSIS; NATURAL FREQUENCIES; OXIDATION; RELIABILITY; RESONATORS; SEMICONDUCTING SILICON; SILICON NITRIDE; STIFFNESS; THIN FILM DEVICES;

EID: 0033727392     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (14)

References (13)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.