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Volumn , Issue , 2000, Pages 229-234
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New failure mechanism in silicon nitride resonators
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CRACK INITIATION;
FAILURE ANALYSIS;
NATURAL FREQUENCIES;
OXIDATION;
RELIABILITY;
RESONATORS;
SEMICONDUCTING SILICON;
SILICON NITRIDE;
STIFFNESS;
THIN FILM DEVICES;
MICROMECHANICAL STRUCTURES;
MICROELECTROMECHANICAL DEVICES;
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EID: 0033727392
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (14)
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References (13)
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