MEMS/NEMS mechanical characterization on different thin film materials by scanning along micro-machined cantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 208-219

  He, J H ^a,b   Luo, J K ^a   Le, H R ^a   Moore, D F ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Cantilevers; Finite Element Analysis (FEA); Laser Micro machining; Mechanical Characterization; MEMS; NEMS; Young's Modulus

Indexed keywords

CANTILEVER BEAMS; ELASTIC MODULI; FINITE ELEMENT METHOD; INDENTATION; INDUSTRIAL APPLICATIONS; MATHEMATICAL MODELS; MICROMACHINING; PROFILOMETRY; THIN FILMS;

LASER MICRO-MACHINING; MECHANICAL CHARACTERIZATIONS; MEMS; NEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 28344454163     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.608710     Document Type: Conference Paper

References (33)

1. T. J. Lu, D. F. Moore, and M. H. Chia, "Mechanics of micromechanical clips for optical fibers," Journal of Micromechanics and Microengineering, vol. 2, 12.
2. D. F. Moore, J. A. Williams, M. A. Hopcroft, P. Boyle, J. H. HE, and R. A. Syms, "Laser Micromachining of thin films for optoelectronic devices and packages," SPIE, vol. 4941, pp. 140-147, 2003.
3. W. N. Sharpe, Jr., B. Yuan, and R. L. Edwards, "A new technique for measuring the mechanical properties of thin films," Journal of Microelectromechanical Systems, vol. 6, pp. 193-199, 1997.
4. P. M. Osterberg and S. D. Senturia, "M-Test: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures," Journal of Microelectromechanical Systems, vol. 6, pp. 107-118, 1997.
5. J. J. Vlassak and W. D. Nix, "New bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films," Journal of Materials Research, vol. 7, pp. 3242-3249, 1992.
6. A. Karimi, O. R. Shojaei, and J. L. Martin, "Mechanical testing and microstructural characterization of TiN thin films," Proceedings of the 1997 MRS Fall Meeting, Dec 1-5 1997, vol. 505, pp. 617-622, 1998.
7. C. A. Klein and G. F. Cardinale, "Young's modulus and Poisson's ratio of CVD diamond," Proceedings of the 3rd International Conference on the New Diamond Science and Technology (ICNDST-3) jointly with 3rd European Conference on Diamond, Diamond-like and Related Coatings (DF '92), Aug 31-Sep 4 1992, vol. 2, pp. 918-923, 1993.
8. J. Yang and O. Paul, "Fracture properties of LPCVD silicon nitride thin films from the load-deflection of long membranes," Transducers'01 Eurosensors XV, Jim 10-14 2001, vol. 97-98, pp. 520-526, 2002.
9. S. P. Baker and W. D. Nix, "Mechanical Properties of Compositionally-Modulated Au-Ni Thin Films: Nanoindentation and Micro-Cantilever Beam Deflection Experiments," Journal of Material Research, vol. 9, pp. 3131-3144, 1994.
10. J.-A. Schweitz, "Mechanical Characterization of Thin Film by Micromechanical Techniques," MRS Bulletin, pp. 34-45, 1992.
11. Y.-C. Tai and R. S. Muller, "Measurement of Young's modulus on microfabricated structures using a surface profiler," IEEE MEMS conference Proceeding, pp. 147-152, 1990.
12. M. W. Denhoff, "A measurement of Young's modulus and residual stress in MEMS bridges using a surface profiler," Journal of Micromechanics and Microengineering, vol. 5, 2003.
13. Y.-J. Su, C.-F. Qian, M.-H. Zhao, and T.-Y. Zhang, "Microbridge testing of silicon oxide/silicon nitride bilayer films deposited on silicon wafers," Acta Materialia, vol. 48, pp. 4901-4915, 2000.
14. T.-Y. Zhang, Y.-J. Su, C.-F. Qian, M.-H. Zhao, and L.-Q. Chen, "Microbridge testing of silicon nitride thin films deposited on silicon wafers," Acta Materialia, vol. 48, pp. 2843-2857, 2000.
15. K. E. Petersen and C. R. Guarnieri, "Young's Modulus Measurements of Thin Films Using Micromechanics," Journal of Applied Physics, vol. 50, pp. 6761-6766, 1979.
16. W. C. Oliver and G. M. Pharr, "Improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments," Journal of Materials Research, vol. 7, pp. 1564-1580, 1992.
17. V. T. Srikar and S. M. Spearing, "A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems," Experimental Mechanics, vol. 43, pp. 238-247, 2003.
18. S. G. Nilsson, E.-L. Sarwe, and L. Montelius, "Fabrication and mechanical characterization of ultrashort nanocantilevers," Applied Physics Letters, vol. 83, pp. 990-992, 2003.
19. S. D. Senturia, Microsystem Design: Kluwer Academic Publishers, 2001.
20. J. H. He, "Development of a micro mechanical characterization process for MEMS thin film material and its application to thermal actuators," in Cambridge University Engineering Department: Ph.D. Thesis, 2004.
21. M. Gad-el-Hak, MEMS Handbook, 2002.
22. V. Ziebart, O. Paul, U. Munch, J. Schwizer, and H. Baltes, "Mechanical properties of thin films from the load deflection of long clamped plates," Journal of Microelectromechanical Systems, vol. 7, pp. 320-328, 1998.
23. T. P. Weihs, S. Hong, J. C. Bravman, and W. D. Nix, "Measuring the Strength and Stiffness of Thin Film Materials by Mechanically Deflecting Cantilever Microbeams," Stresses and Mechanical Properties, vol. 130, pp. 87-92, 1989.
24. S. Timoshenko and J. M. Gere, Mechanics of Materials, 1972.
25. D. G. Ashwell, "The Anticlastic Curvature of Rectangular Beams and Plates," Royal Aeronautical Society, Journal of, vol. 54, pp. 708-715, 1950.
26. M. A. Hopcroft, "MAT-Test: A New Method for Thin-Film Materials Characterization," in Cambridge University Engineering Department: M.Phil. Thesis, 2002.
27. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition, vol. 2, 2002.
28. M. J. Madou, Fundamental of Microfabrication, vol. 2, 1997.
29. J. C. Greenwood, "Silicon in mechanical sensors," Journal of Physics E: Scientific Instruments, vol. 21, pp. 1114-1128, 1988.
30. W. A. Brantley, "Calculated elastic constants for stress problems associated with semiconductor devices," Journal of Applied Physics, vol. 44, 1973.
31. J. K. Luo, J. H. He, A. J. Flewitt, D. F. Moore, S. M. Spearing, N. A. Fleck, and W. I. Milne, "Development of an All-metal Electrothermal Actuator and its Applications, SPIE Proceeding 5344.(2004)," Photonics WEST, vol. 5344, pp. 201-210, 2004.
32. J. K. Luo, A. J. Flewitt, S. M. Spearing, N. A. Fleck, and W. I. Milne, "Young's modulus of electroplated Ni thin film for MEMS applications," Materials Letters, vol. 58, pp. 2306-2309, 2004.
33. R. Muller, M. Adamschik, D. Steidl, E. Kohn, S. Thamasett, S. Stiller, H. Hanke, and V. Hombach, "Application of CVD-diamond for catheter ablation in the heart," Diamond and Related Materials, vol. 13, pp. 1080-1083, 2004.