Laser micromachining of thin films for optoelectronic devices and packages

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4941, Issue , 2002, Pages 140-147

  Moore, David F ^a   Williams, John A ^a   Hopcroft, Matthew A ^a   Boyle, Billy ^a   He, Johnny H ^a   Syms, Richard R A ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Laser micromachining; MEMS; Packaging optoelectronic devices; Thin films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTOELECTRONIC DEVICES; THIN FILMS;

LASER MICROMACHINING;

LASER BEAM EFFECTS;

EID: 0042730172     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.468490     Document Type: Conference Paper

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