Fabrication and mechanical characterization of ultrashort nanocantilevers

Applied Physics Letters

Volumn 83, Issue 5, 2003, Pages 990-992

  Nilsson, S G ^a   Sarwe, E L ^a   Montelius, L ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BENDING (DEFORMATION); CANTILEVER BEAMS; ELECTRON BEAM LITHOGRAPHY; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY;

NANOSCALE CANTILEVERS;

NANOSTRUCTURED MATERIALS;

EID: 0041876448     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1592303     Document Type: Article

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