Two axis micropositioning system with piezoelectric actuators and digital control

Proceedings of SPIE- The International Society for Optical Engineering

Volumn 4356, Issue , 2001, Pages 333-338

  Mikel, B ^a   C�i�p, O ^a   Harna, Z ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Interferometry measurements; Micropositioning; PID controller

Indexed keywords

ACTUATORS; COMPUTER CONTROL SYSTEMS; DIGITAL CONTROL SYSTEMS; INTERFEROMETERS; INTERFEROMETRY; MICROOPTICS; PIEZOELECTRIC TRANSDUCERS; SCANNING; THREE TERM CONTROL SYSTEMS;

PIEZOELECTRIC ACTUATORS; TWO AXIS MICROPOSITIONING SYSTEM;

OPTICAL SYSTEMS;

EID: 0034989530     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.417849     Document Type: Article

References (7)

1. Applied photonics
2. CAN- Controller area network
3. Products for micropositioning
4. Operační zesilovače
5. Měření neelektrických veličin
6. Measurement of submicron laser beam profiles using nanoprobes