An Optimized Magnet-Coil Force Actuator and Its Application to Precision Elastic Mechanisms

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Volumn 204, Issue 4, 1990, Pages 243-253

  Smith, S T ^a   Chetwynd, D G ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM AND ALLOYS; STEEL;

MAGNETIC COIL; PRECISION ELASTIC MECHANISMS;

MECHANISMS;

EID: 0025694055     PISSN: 09544062     EISSN: 20412983     Source Type: Journal    
DOI: 10.1243/PIME_PROC_1990_204_102_02     Document Type: Article

References (22)

1. Drake B. Sonnenfeld R. Schneir J. Hansma P. K. Slough G. Coleman R. V. Tunnelling microscope for operation in air or fluids. Rev. Sci. Instrum., 1986, 57(3), 441–445.
2. Siddons D. P. PhD thesis, 1978, University of London.
3. Bowen D. K. Chetwynd D. G. Davies S. T. Calibration of surface roughness transducers at angstrom levels using X-ray interferometry. Proc. SPIE, San Diego, 1985, 563, 412–419.
4. Hill R. M. Bruce C. F. Limiting precision in a scanning optical interferometer. Aust. J. Phys., 1961, 14, 194–222.
5. Becker P. Seyfried P. Siegert H. Translation stage for a scanning X-ray optical interferometer. Rev. Sci. Instrum., 1987, 52(8), 207–211.
6. Geary P. J. B. SIRA research report M18, 1954.
7. Jones R. V. Richards J. C. S. The design and some applications of sensitive capacitance micrometers. J. Phys. E, 1973, 6, 589–600.
8. Plainevaux J. E. Mouvement de tangage d'une suspension elementaire sur lames elastiques. Nuovo Cimento, 1956, 4(5), 1133–1141.
9. Smith S. T. Chetwynd D. G. Bowen D. K. Design and assessment of monolithic high precision translation mechanisms. J. Phys. E, 1987, 20, 977–983.
10. Tanaka M. The dynamic properties of a monolithic mechanism with notch flexure hinges for precision control of orientation and position. Jap. J. Appl. Phys., 1983, 22, 193–200.
11. Montgomery D. B. Solenoid magnet design, 1969 (Wiley Inter-science, New York).
12. Montgomery D. B. The generation of high magnetic fields. Rept. Prog. Phys., 1963, 26, 69–104.
13. Parker S. F. H. Pollard R. J. Lord D. G. Grundy P. J. Precipitation in NdFeB-type magnet materials. IEEE Trans. Mag., 1987, 23(5), 2103–2105.
14. Sagawa M. Fujinura S. Yamamoto H. Matsuura Y. Hiraga K. Permanent magnet materials based on the rare earth-iron-boron tetragonal compounds. IEEE Trans. Mag., 1984, 20(5), 1584–1589.
15. Hicks T. R. Reay N. K. Atherton P. D. The application of capacitance micrometry to the control of Fabry-Perot etalons. J. Phys. E. Sci. Instrum., 1984, 17, 49–55.
16. Johansson S. Scheitz J. Tenerz L. Tiern J. Fracture testing of silicon microelements in-situ in a scanning electron microscope. J. Appl. Phys., 1988, 63(10), 4799–4803.
17. Chetwynd D. G. Structural materials for precision devices. Precision Engng, 1987, 9(1), 3–6.
18. Hart M. An angstrom ruler. Br. J. Appl. Phys. (Appl. Phys. D), 1968, 1(2), 1405–1408.
19. McScimin H. J. Measurements of elastic constants at low temperature by means of ultrasonic waves—data for silicon and germanium. J. Appl. Phys., 1953, 24(8), 988–997.
20. Alemanni M. Mana G. Pedrotti G. Stron P. P. Zosi G. On the construction of a Zerodur translation device for X-ray interferometric scanning. Metrologia, 1986, 22, 55–63.
21. Lindsey K. Smith S. T. Robbie C. J. Sub-nanometre surface texture and profile measurement with Nanosurf 2. Ann. CIRP, 37(1), 519–522.
22. Lindig O. Pannhorst W. Thermal expansion and length stability of Zerodur in dependence on temperature and time. Appl. Optics, 1984, 24(20), 3330–3334.